Product Details

RSC242 COMPATIBLE WITH FOUP, FOSB

RSC242 COMPATIBLE WITH FOUP, FOSB

No. 1 Market share in semiconductor wafer sorter

No. 1 Cleanliness: <0.01@0.12µ

No. 1 Reliability: MTBF>1,500hr. with maintenance-free robot

No. 1 Accuracy (Repeatable data X/Y: +/-0.036mm 3σ)

Product features

  • Consist of high speed with minimum space, vibration and noise.
  • SEMI M12, T7 and M1.15 compliant.
  • It can read on both sides of the wafer. (Top and Reverse side)
  • A combination of optical and image processing provides a high resolution for ID recognition.
  • Cleanliness is achieved through the usage of Ferro-fluid seal and a fully enclosed drum cover.
  • Based on the visible airflow analysis, a pressure separation plate was installed to aid in decreasing particle generation within the transfer area. (Not applicable to all models)
  • By using a dual arm robot, wafer exchange on the process stage can take place simultaneously.
  • RORZE's new model of controllers is able to provide optimal acceleration/deceleration of the robot.

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Company Details

RORZE TECHNOLOGY SINGAPORE PTE LTD

Block 73 Ubi Road 1
#09-64 Oxley Bizhub
Singapore 408733

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Mr Wayne Chew, Sales & Service Manager

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